Viser treff 1-1 av 1
Beam and plasma properties downstream from positively biased source chamber
(Master thesis; Mastergradsoppgave, 2017-06-06)
We study the effect of changing the separation grid bias in a double plasma device from -50 V to the same bias as the anode in the source chamber, 115 V on the plasma and beam parameters downstream in the target chamber. Two different probes were used to analyze the downstream plasma. We used an RFEA-probe to obtain information about the ions, such as the ion energy distribution and we constructed ...