dc.contributor.author | Yallew, Henock Demessie | |
dc.contributor.author | Jágerská, Jana | |
dc.contributor.author | Greve, Martin Møller | |
dc.date.accessioned | 2023-02-03T08:17:14Z | |
dc.date.available | 2023-02-03T08:17:14Z | |
dc.date.issued | 2022-12-06 | |
dc.description.abstract | We use the fixed beam moving stage (FBMS) electron beam lithography technique to pattern a 10 mm long slot waveguide with s-bend tapered double-tip couplers. The fabrication method solves two major limitations of the FBMS mode, namely, the requirement for fixed-width structures and the incidence of stage placement drift for patterns involving elements of different widths. This has been achieved by fracturing the outline of the structure into fixed-width elements of gradually increasing width and creating intermediate overlap areas between the elements to mitigate the stage placement drifts. | en_US |
dc.identifier.citation | Yallew HD, Jágerská J, Greve MM. Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography. Journal of Vacuum Science & Technology B. 2022 | en_US |
dc.identifier.cristinID | FRIDAID 2099480 | |
dc.identifier.doi | 10.1116/6.0002187 | |
dc.identifier.issn | 1071-1023 | |
dc.identifier.issn | 1520-8567 | |
dc.identifier.uri | https://hdl.handle.net/10037/28482 | |
dc.language.iso | eng | en_US |
dc.publisher | American Institute of Physics | en_US |
dc.relation.journal | Journal of Vacuum Science & Technology B | |
dc.relation.projectID | info:eu-repo/grantAgreement/EC/H2020/758973/Norway/Cryptophane-Enhanced Trace Gas Spectroscopy for On-Chip Methane Detection/sCENT/ | en_US |
dc.rights.accessRights | openAccess | en_US |
dc.rights.holder | Copyright 2022 The Author(s) | en_US |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0 | en_US |
dc.rights | Attribution 4.0 International (CC BY 4.0) | en_US |
dc.title | Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography | en_US |
dc.type.version | acceptedVersion | en_US |
dc.type | Journal article | en_US |
dc.type | Tidsskriftartikkel | en_US |
dc.type | Peer reviewed | en_US |