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dc.contributor.authorVlk, Marek
dc.contributor.authorDatta, Anurup
dc.contributor.authorAlberti, Sebastian
dc.contributor.authorMurugan, Ganapathy Senthil
dc.contributor.authorAksnes, Astrid
dc.contributor.authorJagerska, Jana
dc.date.accessioned2021-10-21T07:03:24Z
dc.date.available2021-10-21T07:03:24Z
dc.date.issued2021-08-23
dc.description.abstractTypical applications of integrated photonics in the mid-infrared (MIR) are different from near-infrared (telecom) range and, in many instances, they involve chemical sensing through MIR spectroscopy. Such applications necessitate tailored designs of optical waveguides. Both cross-sectional designs and processing methods of MIR waveguides have been a subject of extensive research, where material transparency and substrate leakage of guided modes have been the most common challenges. Both these challenges can be solved simultaneously with air-suspended waveguides. In this paper, tantalum pentoxide (Ta<sub>2</sub>O<sub>5</sub>, tantala) thin films deposited on silicon were tested for two different dry under-etching procedures, XeF<sub>2</sub> and SF<sub>6</sub> plasma, with both of them facilitating selective removal of silicon. We analyze the advantages and limitations of these two methods and optimize the processing for fabricating membranes with arbitrary length and cross-sectional aspect ratio over 300. The performance of these high-aspect-ratio membranes as a framework for single-mode waveguides is rigorously analyzed at 2566 nm wavelength. With tantala being transparent up to 10 µm wavelength, such waveguides are particularly well suited for gas sensing in MIR.en_US
dc.identifier.citationVlk, Datta, Alberti, Murugan, Aksnes, Jagerska. Free-standing tantalum pentoxide waveguides for gas sensing in the mid-infrared. Optical Materials Express. 2021en_US
dc.identifier.cristinIDFRIDAID 1928230
dc.identifier.doi10.1364/OME.430994
dc.identifier.issn2159-3930
dc.identifier.urihttps://hdl.handle.net/10037/22796
dc.language.isoengen_US
dc.publisherOptical Society of Americaen_US
dc.relation.journalOptical Materials Express
dc.relation.projectIDTromsø forskningsstiftelse: 17_SG_JJen_US
dc.relation.projectIDERC-European Research Council: 758973en_US
dc.relation.projectIDEngineering and Physical Sciences Research Council (EPSRC): EP/N00762X/1en_US
dc.relation.projectIDNorges forskningsråd: 262608en_US
dc.relation.projectIDNorges forskningsråd: 295864en_US
dc.relation.projectIDNorges forskningsråd: 221860en_US
dc.relation.projectIDinfo:eu-repo/grantAgreement/RCN/FORSKSKOLE/221860/Norway/NanoNetwork - Norwegian PhD Network on Nanotechnology for Microsystems - Phase 2//en_US
dc.relation.projectIDinfo:eu-repo/grantAgreement/RCN/FRINATEK/262608/Norway/Mid-Infrared CRyptophane-enhanced On-chip Sensor//en_US
dc.relation.projectIDinfo:eu-repo/grantAgreement/RCN/FORINFRA/295864/Norway/Norwegian Micro- and Nanofabrication Facility III//en_US
dc.relation.projectIDinfo:eu-repo/grantAgreement/EC/H2020/758973/EU/Cryptophane-Enhanced Trace Gas Spectroscopy for On-Chip Methane Detection/sCENT/en_US
dc.rights.accessRightsopenAccessen_US
dc.rights.holderCopyright 2021 The Author(s)en_US
dc.subjectVDP::Technology: 500en_US
dc.subjectVDP::Teknologi: 500en_US
dc.titleFree-standing tantalum pentoxide waveguides for gas sensing in the mid-infrareden_US
dc.type.versionpublishedVersionen_US
dc.typeJournal articleen_US
dc.typeTidsskriftartikkelen_US
dc.typePeer revieweden_US


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